JPH0737311Y2 - 処理装置の気泡発生防止装置 - Google Patents
処理装置の気泡発生防止装置Info
- Publication number
- JPH0737311Y2 JPH0737311Y2 JP1990032816U JP3281690U JPH0737311Y2 JP H0737311 Y2 JPH0737311 Y2 JP H0737311Y2 JP 1990032816 U JP1990032816 U JP 1990032816U JP 3281690 U JP3281690 U JP 3281690U JP H0737311 Y2 JPH0737311 Y2 JP H0737311Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing
- tank
- discharge port
- substrate
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002265 prevention Effects 0.000 title description 4
- 239000007788 liquid Substances 0.000 claims description 29
- 239000000758 substrate Substances 0.000 description 27
- 238000004140 cleaning Methods 0.000 description 20
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990032816U JPH0737311Y2 (ja) | 1990-03-30 | 1990-03-30 | 処理装置の気泡発生防止装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990032816U JPH0737311Y2 (ja) | 1990-03-30 | 1990-03-30 | 処理装置の気泡発生防止装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03124635U JPH03124635U (en]) | 1991-12-17 |
| JPH0737311Y2 true JPH0737311Y2 (ja) | 1995-08-23 |
Family
ID=31536016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990032816U Expired - Lifetime JPH0737311Y2 (ja) | 1990-03-30 | 1990-03-30 | 処理装置の気泡発生防止装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737311Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009032217A1 (de) * | 2009-07-06 | 2011-01-13 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Behandlung von Substraten |
| JP2011106888A (ja) * | 2009-11-13 | 2011-06-02 | Aloka Co Ltd | 液体計量容器および液体計量装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6319331U (en]) * | 1986-07-25 | 1988-02-08 |
-
1990
- 1990-03-30 JP JP1990032816U patent/JPH0737311Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03124635U (en]) | 1991-12-17 |
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